Bagul, PratikPratikBagulHan, HanHanHanLagrain, PieterPieterLagrainSergeant, StefanieStefanieSergeantHoflijk, IlseIlseHoflijkSerron, JillJillSerronRichard, OlivierOlivierRichardConard, ThierryThierryConardVan Houdt, JanJanVan HoudtDe Wolf, IngridIngridDe WolfMcMitchell, SeanSeanMcMitchell2025-05-052024-11-162025-05-0520252199-160XWOS:001348619500001https://imec-publications.be/handle/20.500.12860/44785Achieving High Ferroelectric Polarization in Ultrathin BaTiO3 Films on SiJournal article10.1002/aelm.202400440WOS:001348619500001THIN-FILMSSILICIDE FORMATIONPHASE-TRANSITIONPTSISTRAINOXIDEELECTRORESISTANCESTABILITYTHICKNESSLAYERS