Vereecke, GuyGuyVereeckeHolsteyns, FrankFrankHolsteynsArnauts, SophiaSophiaArnautsBeckx, StephanStephanBeckxJaenen, PatrickPatrickJaenenKenis, KarineKarineKenisLismont, MarkMarkLismontLux, MarcelMarcelLuxVos, RitaRitaVosSnow, JimJimSnowMertens, PaulPaulMertens2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11504Evaluation of megasonic cleaning for sub-90-nm technologiesProceedings paper