Effect of substrate defects on GOI of ultra-thin gate oxides

Bearda, TwanTwanBeardaVanhellemont, JanJanVanhellemontMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2376Effect of substrate defects on GOI of ultra-thin gate oxidesProceedings paper