Nigam, TanyaTanyaNigamDepas, MichelMichelDepasHeyns, MarcMarcHeynsSofield, C. F.C. F.SofieldMapeldoram, L.L.Mapeldoram2021-09-302021-09-301997https://imec-publications.be/handle/20.500.12860/2057Influence of boron diffusion on ultra-thin oxidesProceedings paper