Gong, ChunChunGongSimoen, EddyEddySimoenZhao, LuLuZhaoPosthuma, NielsNielsPosthumaVan Kerschaver, EmmanuelEmmanuelVan KerschaverPoortmans, JefJefPoortmansMertens, RobertRobertMertens2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17161Study of silicon-silicon nitride interface properties on flat and textured surfaces by deep level transient spectroscopyProceedings paper