Characterization of the post dry etch cleaning of the silicon surface prior to silicon epitaxial growth

Kim, Young-ChangYoung-ChangKimCaymax, MattyMattyCaymaxBender, HugoHugoBenderVanhaelemeersch, SergeSergeVanhaelemeersch2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2666Characterization of the post dry etch cleaning of the silicon surface prior to silicon epitaxial growthOral presentation