Rouzbahani Bayatani, RozitaRozitaRouzbahani BayataniNicley, Shannon S.Shannon S.NicleyVanpoucke, Danny E.P.Danny E.P.VanpouckeLloret, FernandoFernandoLloretPobedinskas, PauliusPauliusPobedinskasAraujo, DanielDanielAraujoHaenen, KenKenHaenen2021-10-292021-10-2920200008-6223https://imec-publications.be/handle/20.500.12860/35858Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layersJournal articlehttps://doi.org/10.1016/j.carbon.2020.10.061