Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry

Clemmen, StephaneStephaneClemmenHermans, ArturArturHermansSolano, EduardoEduardoSolanoDendooven, JolienJolienDendoovenKoskinen, KalleKalleKoskinenKauranen, MartiMartiKauranenBrainis, EdouardEdouardBrainisDetavernier, ChristopheChristopheDetavernierBaets, RoelRoelBaets2021-10-222021-10-222015-110146-9592https://imec-publications.be/handle/20.500.12860/25086Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitryJournal articlehttps://www.osapublishing.org/ol/abstract.cfm?uri=ol-40-22-5371