Kuhn, MarkusMarkusKuhnCea, StephenStephenCeaZhang, JiongJiongZhangWormingtong, MatthewMatthewWormingtongNuytten, ThomasThomasNuyttenDe Wolf, IngridIngridDe WolfZuo, Jian-MinJian-MinZuoRouviere, Jean-LucJean-LucRouviere2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28716Transistor strain measurement techniques and their applicationsBook chapterhttps://www.crcpress.com/Metrology-and-Diagnostic-Techniques-for-Nanoelectronics/Ma-Seiler/p/book/9789814745086