Towards improved atom probe tomography analysis of semiconductors: unraveling the dynamic evolution of the semiconductor emitter

Vandervorst, W.Fleischmann, C.Op de Beeck, JohanJohanOp de Beeck2026-05-292026-05-292021-12https://imec-publications.be/handle/20.500.12860/59489Towards improved atom probe tomography analysis of semiconductors: unraveling the dynamic evolution of the semiconductor emitterPHD thesis