Model for the voltage and charge actuations of deformable clamped-clamped beams in presence of dielectric charging

Rottenberg, XavierXavierRottenbergNauwelaers, BartBartNauwelaersYeatman, Eric M.Eric M.YeatmanDe Wolf, IngridIngridDe WolfDe Raedt, WalterWalterDe RaedtTilmans, HarrieHarrieTilmans2021-10-162021-10-162005-09https://imec-publications.be/handle/20.500.12860/11137Model for the voltage and charge actuations of deformable clamped-clamped beams in presence of dielectric chargingProceedings paper