El Rifai, JoumanaJoumanaEl RifaiSedky, SherifSherifSedkyAbdel Aziz, AhmedAhmedAbdel AzizPuers, BobBobPuersVan Hoof, ChrisChrisVan HoofWitvrouw, AnnAnnWitvrouw2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17061Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210CMeeting abstract