Overgrowth and defect characterization of strained Si/SiGe heterostructures on Si(100)

Mantl, SSMantlBuca, D.D.BucaFeste, S.S.FesteHollander, B.B.HollanderLenk, St.St.LenkLoo, RogerRogerLooCaymax, MattyMattyCaymaxCarius, R.R.CariusSchaefer, H.H.Schaefer2021-10-162021-10-162005-05https://imec-publications.be/handle/20.500.12860/10846Overgrowth and defect characterization of strained Si/SiGe heterostructures on Si(100)Proceedings paper