TEM analysis and electrical probing on thin TEM lamellas of CBRAM stacks

Seidel, FelixFelixSeidelRichard, OlivierOlivierRichardBender, HugoHugoBenderHantschel, ThomasThomasHantschelGoux, LudovicLudovicGouxJurczak, GosiaGosiaJurczakVandervorst, WilfriedWilfriedVandervorst2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24503TEM analysis and electrical probing on thin TEM lamellas of CBRAM stacksOral presentation