Van Dal, MarkMarkVan DalAkheyar, AmalAmalAkheyarKittl, JorgeJorgeKittlChamirian, OxanaOxanaChamiriande Potter de ten Broeck, MurielMurielde Potter de ten BroeckDemeurisse, CarolineCarolineDemeurisseLauwers, AnneAnneLauwersMaex, KarenKarenMaex2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9719Effects of alloying on properties of NiSi for CMOS applicationsProceedings paper