Gronheid, RoelRoelGronheidVaglio Pret, AlessandroAlessandroVaglio PretRathsack, BenjaminBenjaminRathsackHooge, JoshuaJoshuaHoogeScheer, StevenStevenScheerNafus, KathleenKathleenNafusShite, HideoHideoShiteKitano, JunichiJunichiKitano2021-10-192021-10-1920111537-1646https://imec-publications.be/handle/20.500.12860/19014Resolution-linewidth roughness-sensitivity performance tradeoffs for an extreme ultraviolet polymer bound photo-acid generator resistJournal article