Improvements in the measurement of local critical dimension uniformity for holes and pillars

Mack, Chris A.Chris A.MackDelvaux, ChristieChristieDelvauxDe Simone, DaniloDaniloDe SimoneLorusso, GianGianLorusso2024-04-162024-01-132024-04-162023978-1-5106-6748-80277-786XWOS:001125089900015https://imec-publications.be/handle/20.500.12860/43404Improvements in the measurement of local critical dimension uniformity for holes and pillarsProceedings paper10.1117/12.2688355978-1-5106-6749-5WOS:001125089900015