Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium ion battery electrode material

Dobbelaere, ThomasThomasDobbelaereMattelaer, FelixFelixMattelaerVereecken, PhilippePhilippeVereeckenDetavernier, ChristopheChristopheDetavernier2021-10-242021-10-2420170734-2101https://imec-publications.be/handle/20.500.12860/28260Plasma-enhanced atomic layer deposition of vanadium phosphate as a lithium ion battery electrode materialJournal articlehttp://avs.scitation.org/doi/abs/10.1116/1.4987131