Unified Fe calculations of stresses in locos, stripes and quantum device heterostructures

Jain, SureshSureshJainPinardi, KuntjoroKuntjoroPinardiMaes, HermanHermanMaes2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1274Unified Fe calculations of stresses in locos, stripes and quantum device heterostructuresProceedings paper