Doise, JanJanDoise2021-10-242021-10-242017-11https://imec-publications.be/handle/20.500.12860/28263Implementation of Block Copolymer Based Directed Self-assembly for Advanced LithographyPHD thesishttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS1733284&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US&fromSitemap=1