Recent improvements in the fabrication and performances of AlN based piezoelectric vibration energy harvesters

Renaud, MichaelMichaelRenaudElfrink, ReneReneElfrinkJambunathan, MadhuMadhuJambunathande Nooijer, ChristineChristinede NooijerRovers, MadelonMadelonRoversVullers, RuudRuudVullersvan Schaijk, RobRobvan Schaijk2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19680Recent improvements in the fabrication and performances of AlN based piezoelectric vibration energy harvestersProceedings paper