Iker, FrancoisFrancoisIkerFunaya, TakuoTakuoFunayaCotrin Teixeira, RicardoRicardoCotrin TeixeiraRuythooren, WouterWouterRuythooren2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15524Diamond bit cutting as alternative to polymer patterning for 3D interconnections technologiesProceedings paper