Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplication

Rincon Delgadillo, PaulinaPaulinaRincon DelgadilloGronheid, RoelRoelGronheidThode, ChristopherChristopherThodeWu, HengpengHengpengWuCao, YiYiCaoLin, GuanyangGuanyangLinSomervell, MarkMarkSomervellNafus, KathleenKathleenNafusNealey, PaulPaulNealey2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21391Determination of critical parameters for control of directed self-assembly of block copolymers using frequency multiplicationOral presentation