Quantitative compositional analysis of compound semiconductors by atom probe tomography

Cuduvally, RamyaRamyaCuduvallyMorris, RichardRichardMorrisBogdanowicz, JanuszJanuszBogdanowiczMelkonyan, DavitDavitMelkonyanArnoldi, LaurentLaurentArnoldiFleischmann, ClaudiaClaudiaFleischmannVandervorst, WilfriedWilfriedVandervorst2021-10-252021-10-252018https://imec-publications.be/handle/20.500.12860/30477Quantitative compositional analysis of compound semiconductors by atom probe tomographyMeeting abstract