Performance and leakage optimization in carbon and fluorine C0-implanted pMOSFETs

Pawlak, BartekBartekPawlakDuffy, RayRayDuffyHooker, JacobJacobHookerHoffmann, ThomasThomasHoffmannFelch, S.B.S.B.FelchEyben, PierrePierreEybenAbsil, PhilippePhilippeAbsilLander, RobRobLander2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14296Performance and leakage optimization in carbon and fluorine C0-implanted pMOSFETsProceedings paper