Maslow, Mark JohnMark JohnMaslowYaegashi, HidetamiHidetamiYaegashiFrommhold, AndreasAndreasFrommholdSchiffelers, GuidoGuidoSchiffelersWahlisch, FelixFelixWahlischRispens, GijsbertGijsbertRispensSlachter, BramBramSlachterYoshida, KeisukeKeisukeYoshidaHara, ArisaArisaHaraOikawa, NoriakiNoriakiOikawaPathak, AbhinavAbhinavPathakCerbu, DorinDorinCerbuHendrickx, EricEricHendrickxBekaert, JoostJoostBekaert2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33556Impact of local variability on defect-aware process windowsProceedings paperhttps://doi.org/10.1117/12.2514719