Ruthenocene and cyclopentadienyl pyrrolyl ruthenium as precursors for ruthenium atomic layer deposition: a comparative study of dissociation enthalpies

Phung, QuanQuanPhungVancoillie, StevenStevenVancoillieDelabie, AnneliesAnneliesDelabiePourtois, GeoffreyGeoffreyPourtoisPierloot, ChristineChristinePierloot2021-10-202021-10-2020121432-881Xhttps://imec-publications.be/handle/20.500.12860/21305Ruthenocene and cyclopentadienyl pyrrolyl ruthenium as precursors for ruthenium atomic layer deposition: a comparative study of dissociation enthalpiesJournal article