Carrier spilling revisited: on-bevel junction behavior of different electrical depth profiling techniques

Clarysse, TrudoTrudoClarysseEyben, PierrePierreEybenDuhayon, NatasjaNatasjaDuhayonXu, MingweiMingweiXuVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7330Carrier spilling revisited: on-bevel junction behavior of different electrical depth profiling techniquesJournal article