Selective etches for gate-all-around (GAA) device integration: opportunities and challenges

Oniki, YusukeYusukeOnikiAltamirano Sanchez, EfrainEfrainAltamirano SanchezHolsteyns, FrankFrankHolsteyns2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33696Selective etches for gate-all-around (GAA) device integration: opportunities and challengesMeeting abstracthttp://ma.ecsdl.org/content/MA2019-02/23/1092.abstract