Davydova, NataliaNataliaDavydovaLiu, FeiFeiLiuBenk, MarkusMarkusBenkvan Setten, EelcoEelcovan SettenBottiglieri, GerardoGerardoBottiglierivan Oosten, AntonAntonvan OostenMcNamara, JohnJohnMcNamaraWiaux, VincentVincentWiauxFranke, Joern-HolgerJoern-HolgerFrankeGoldberg, KennethKennethGoldbergNam, D. S.D. S.NamZekry, JosephJosephZekryNaulleau, PatrickPatrickNaulleauFliervoet, TimonTimonFliervoetCarpaij, ReneReneCarpaij2022-01-282021-11-022022-01-2820200277-786XWOS:000632585900013https://imec-publications.be/handle/20.500.12860/38087Experimental verification of high-NA imaging simulations using SHARPProceedings paper10.1117/12.2572846978-1-5106-3843-3WOS:000632585900013