Low-loss and high-index contrast ultraviolet-C free-standing waveguides made of thermal silicon oxide

Su, ChenmingChenmingSuConcha, Claudio A. JaramilloClaudio A. JaramilloConchaLin, ChupaoChupaoLinQuack, NielsNielsQuackGalland, ChristopheChristopheGallandLe Thomas, NicolasNicolasLe Thomas2024-11-192024-08-292024-11-1920240146-9592WOS:001294036200009https://imec-publications.be/handle/20.500.12860/44383Low-loss and high-index contrast ultraviolet-C free-standing waveguides made of thermal silicon oxideJournal article10.1364/OL.530364WOS:001294036200009SPECTROSCOPYPHOTONICSMEDLINE:38950267