Two-dimensional profiling using scanning spreading resistance microscopy

De Wolf, PeterPeterDe WolfVandervorst, WilfriedWilfriedVandervorstClarysse, TrudoTrudoClarysseTrenkler, ThomasThomasTrenklerHantschel, ThomasThomasHantschelStephenson, RobertRobertStephenson2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3392Two-dimensional profiling using scanning spreading resistance microscopyOral presentation