CMP process steps for the fabrication of spin-transfer torque magnetic random access memory

Tsvetanova, DianaDianaTsvetanovaHeylen, NancyNancyHeylenTeugels, LieveLieveTeugelsCrotti, DavideDavideCrottiDonadio, Gabriele LucaGabriele LucaDonadioKar, Gouri SankarGouri SankarKarStruyf, HerbertHerbertStruyfSouriau, LaurentLaurentSouriauMertens, SofieSofieMertensSwerts, JohanJohanSwertsCouet, SebastienSebastienCouetLin, TsannTsannLinParaschiv, VasileVasileParaschivKim, WoojinWoojinKimRao, SiddharthSiddharthRao2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27408CMP process steps for the fabrication of spin-transfer torque magnetic random access memoryProceedings paperhttp://www.clarkson.edu/camp/cmp16/Agenda%20per%208-4-16.pdf