Electric stress-induced degradation of thin oxide layers and its impact on device reliability

Degraeve, RobinRobinDegraeveKaczer, BenBenKaczerRoussel, PhilippePhilippeRousselGroeseneken, GuidoGuidoGroeseneken2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6245Electric stress-induced degradation of thin oxide layers and its impact on device reliabilityProceedings paper