Aarts, ArnoArnoAartsPereira Neves, HerculesHerculesPereira NevesPuers, BobBobPuersVan Hoof, ChrisChrisVan Hoof2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11616Interconnect for out-of-plane MEMSMeeting abstract