Evolution of (001) and (111) facets for selective epitaxial growth inside Submicron trenches

Jiang, SijiaSijiaJiangMerckling, ClementClementMercklingGuo, WeimingWeimingGuoWaldron, NiamhNiamhWaldronCaymax, MattyMattyCaymaxVandervorst, WilfriedWilfriedVandervorstSeefeldt, MarcMarcSeefeldtHeyns, MarcMarcHeyns2021-10-222021-10-2220140021-8979https://imec-publications.be/handle/20.500.12860/24010Evolution of (001) and (111) facets for selective epitaxial growth inside Submicron trenchesJournal articlehttp://scitation.aip.org/content/aip/journal/jap/115/2/10.1063/1.4861416