Lujan, GuilhermeGuilhermeLujanKubicek, StefanStefanKubicekDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsMagnus, WimWimMagnusDe Meyer, KristinKristinDe Meyer2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7833Mobility degradation in high-k transistors: the role of the charge scatteringProceedings paper