Stress polarity dependence of degradation and breakdown of SiO2/high-k stacks

Degraeve, RobinRobinDegraeveKauerauf, ThomasThomasKaueraufKerber, AndreasAndreasKerberCartier, E.E.CartierGovoreanu, BogdanBogdanGovoreanuRoussel, PhilippePhilippeRousselPantisano, LuigiLuigiPantisanoBlomme, PieterPieterBlommeKaczer, BenBenKaczerGroeseneken, GuidoGuidoGroeseneken2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7478Stress polarity dependence of degradation and breakdown of SiO2/high-k stacksProceedings paper