Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths

Prager, L.L.PragerMarsik, PremyslPremyslMarsikWennrich, L.L.WennrichBaklanov, MikhaïlMikhaïlBaklanovNaumov, S.S.NaumovPistol, L.L.PistolSchneider, D.D.SchneiderGerlach, J.W.J.W.GerlachVerdonck, PatrickPatrickVerdonckBuchmeiser, M.R.M.R.Buchmeiser2021-10-172021-10-1720080167-9317https://imec-publications.be/handle/20.500.12860/14342Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengthsJournal article