Indium-assisted growth of Si nanowires: perspectives on controlled growth for CMOS applications

Iacopi, FrancescaFrancescaIacopiEichhammer, YannYannEichhammerMassy, ClaireClaireMassyVereecken, PhilippePhilippeVereeckenMoelans, NeleNeleMoelansRichard, OlivierOlivierRichardSmeets, DriesDriesSmeetsBlanpain, BartBartBlanpainDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeyns2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13910Indium-assisted growth of Si nanowires: perspectives on controlled growth for CMOS applicationsProceedings paper