High-stability numerical algorithm for the simulation of deformable electrostatic MEMS devices

Rottenberg, XavierXavierRottenbergNauwelaers, BartBartNauwelaersDe Raedt, WalterWalterDe RaedtElata, DavidDavidElata2021-10-172021-10-172008-06https://imec-publications.be/handle/20.500.12860/14398High-stability numerical algorithm for the simulation of deformable electrostatic MEMS devicesProceedings paper