In-situ ToF-SIMS and SFM measurements of inorganic semiconductor materials

Franquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinatoConard, ThierryThierryConardMollers, RudolfRudolfMollersNiehuis, EwaldEwaldNiehuisVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26637In-situ ToF-SIMS and SFM measurements of inorganic semiconductor materialsOral presentation