Foubert, PhilippePhilippeFoubertVaglio Pret, AlessandroAlessandroVaglio PretAltamirano Sanchez, EfrainEfrainAltamirano SanchezGronheid, RoelRoelGronheid2021-10-192021-10-192011-071537-1646https://imec-publications.be/handle/20.500.12860/18922Impact of post-litho linewidth roughness smoothing processes on the post-etch patterning resultJournal articlehttp://spiedigitallibrary.org/jm3/resource/1/jmmmgf/v10/i3/p033001_s1