Oliver, M.J.M.J.OliverHernando-Garcia, J.J.Hernando-GarciaAbabneh, A.A.AbabnehSeidel, H.H.SeidelSchmid, U.U.SchmidAndres, J.P.J.P.AndresPobedinskas, PauliusPauliusPobedinskasHaenen, KenKenHaenen2021-10-202021-10-2020120946-7076https://imec-publications.be/handle/20.500.12860/21219Resonantly excited AlN-based microcantilevers for immunosensingJournal article