Texture, twinning and metastable "tetragonal" phase in ultrathin films of HfO2 on a Si substrate

MacLaren, I.I.MacLarenRas, T.T.RasMacKenzie, M.M.MacKenzieCraven, A.J.A.J.CravenMcComb, D.W.D.W.McCombDe Gendt, StefanStefanDe Gendt2021-10-182021-10-1820090013-4651https://imec-publications.be/handle/20.500.12860/15776Texture, twinning and metastable "tetragonal" phase in ultrathin films of HfO2 on a Si substrateJournal article