Integration scheme and 3D RC extractions of three-level supervia at 16 nm half-pitch

Gupta, AnshulAnshulGuptaBoemmels, JuergenJuergenBoemmelsSaad, YvesYvesSaadCiofi, IvanIvanCiofiWilson, ChrisChrisWilson2021-10-252021-10-2520180167-9317https://imec-publications.be/handle/20.500.12860/30822Integration scheme and 3D RC extractions of three-level supervia at 16 nm half-pitchJournal articlehttps://doi.org/10.1016/j.mee.2018.01.013