Stress induced defect generation implications of doping HfO2 with Al

O'Connor, RobertRobertO'ConnorKauerauf, ThomasThomasKaueraufArimura, HiroakiHiroakiArimuraRagnarsson, Lars-AkeLars-AkeRagnarsson2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22879Stress induced defect generation implications of doping HfO2 with AlMeeting abstract