Interfacial reactions and phase stabilization of doped hafnia and higher-k oxides: the added value of GATR-FTIR

Hardy, AnAnHardyAdelmann, ChristophChristophAdelmannVan Elshocht, SvenSvenVan ElshochtFavia, PaolaPaolaFaviaBender, HugoHugoBenderFranquet, AlexisAlexisFranquetVan den Rul, HeidiHeidiVan den RulVan Bael, MarliesMarliesVan BaelD'Haen, JanJanD'HaenDe Gendt, StefanStefanDe GendtD'Olieslaeger, MarcMarcD'OlieslaegerHeyns, MarcMarcHeynsKittl, JorgeJorgeKittlDetavernier, ChristopheChristopheDetavernierMullens, JulesJulesMullens2021-10-172021-10-172009https://imec-publications.be/handle/20.500.12860/15440Interfacial reactions and phase stabilization of doped hafnia and higher-k oxides: the added value of GATR-FTIROral presentation