El Otell, ZiadZiadEl OtellSamara, VladimirVladimirSamaraZotovich, AlexeyAlexeyZotovichHansen, TerjeTerjeHansende Marneffe, Jean-FrancoisJean-Francoisde MarneffeBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-2220150022-3727https://imec-publications.be/handle/20.500.12860/25251Vacuum ultra-violet emission of CF4 & CF3I containing plasmas and their effect on low-k materialsJournal articlehttp://iopscience.iop.org/article/10.1088/0022-3727/48/39/395202