The electrical equivalent sidewall damage in patterned low-k dielectrics

Iacopi, FrancescaFrancescaIacopiStucchi, MicheleMicheleStucchiRichard, OlivierOlivierRichardMaex, KarenKarenMaex2021-10-152021-10-152004-02https://imec-publications.be/handle/20.500.12860/9083The electrical equivalent sidewall damage in patterned low-k dielectricsJournal article